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Feedback Control Strategy for a High Speed Differential Piezo-Driven Stage by an Exclusive use of Piezoelectric Sensors

- Leiro, Freddy Romero, Bazaei, Ali, Regnier, Stephane, Boudaoud, Mokrane

Piezo displacement sensors for a compact high-speed x–y nanopositioner in differential actuation mode

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

Hysteresis in nanopositioning systems driven by dual-stack differential driving piezoelectric actuators

- Ettefagh, Massoud Hemmasian, Bazaei, Ali, Wang, Zhiyue, Chen, Zhiyong, Zhang, Hai-Tao, Regnier, Stephane, Boudaoud, Mokrane

Displacement sensing by piezoelectric transducers in high-speed lateral nanopositioning

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

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